JPH0325238U - - Google Patents
Info
- Publication number
- JPH0325238U JPH0325238U JP8587489U JP8587489U JPH0325238U JP H0325238 U JPH0325238 U JP H0325238U JP 8587489 U JP8587489 U JP 8587489U JP 8587489 U JP8587489 U JP 8587489U JP H0325238 U JPH0325238 U JP H0325238U
- Authority
- JP
- Japan
- Prior art keywords
- inspection device
- semiconductor wafer
- semiconductor
- section
- semiconductor inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 4
- 238000007689 inspection Methods 0.000 claims 2
- 239000000523 sample Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8587489U JPH0325238U (en]) | 1989-07-20 | 1989-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8587489U JPH0325238U (en]) | 1989-07-20 | 1989-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0325238U true JPH0325238U (en]) | 1991-03-15 |
Family
ID=31635224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8587489U Pending JPH0325238U (en]) | 1989-07-20 | 1989-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325238U (en]) |
-
1989
- 1989-07-20 JP JP8587489U patent/JPH0325238U/ja active Pending
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